Helium, the least reactive element. Helium is normally a colorless, odorless gas and is the only substance that cannot solidify at standard atmospheric pressure.
Specification:
| Specification | Company Standard |
| He | ≥ 99.999% |
| N2 | ≤ 2.0 ppm |
| O2+AR | ≤ 1.0 ppm |
| H2 | ≤ 1.0 ppm |
| CO | ≤ 0.5 ppm |
| CO2 | ≤ 0.5 ppm |
| Ne | ≤ 1.0 ppm |
| CH4 | ≤ 0.5 ppm |
| Moisture | ≤ 0.5 ppm |